Class | FED STD | ||||||
>=0.1μm | >=0.2μm | >=0.3μm | >=0.5μm | >=1μm | >=5μm | 209E equivalent | |
ISO 1 | 10 | 2 | |||||
ISO 2 | 100 | 24 | 10 | 4 | |||
ISO 3 | 1000 | 237 | 102 | 35 | 8 | Class 1 | |
ISO 4 | 10000 | 2370 | 1020 | 352 | 83 | Class 10 | |
ISO 5 | 100000 | 23700 | 10200 | 3520 | 832 | 29 | Class 100 |
ISO 6 | 10000000 | 237000 | 102000 | 35200 | 8320 | 293 | Class 1000 |
ISO 7 | 352000 | 83200 | 2930 | Class 10000 | |||
ISO 8 | 3520000 | 832000 | 29300 | Class 100000 | |||
ISO 9 | 35200000 | 8320000 | 293000 | Room Air |
Different grades of clean rooms have their applications and would be selected according to actual needs. In practical use, the comprehensive consideration of many factors is involved, and only scientific and reasonable design and operation can ensure the quality and stability of the clean room environment.