Cleanliness class requirements for clean rooms [examples of industry applications]1

Cleanliness level requirements of clean workshops [Industry application example] At present, clean workshops have been widely used in product production in all walks of life or other environmental control requirements to prevent particle pollution and microbial pollution. The production process of various products is different, and the requirements for use are different, so the content and indicators of the control environment are not the same. The content of environmental control in the so-called clean room should include: air purification, clean buildings, water or gas or chemicals in direct contact with products, pollution control of production pharma machinery, tools, etc., and control of micro-vibration, noise, static electricity, etc. prevent etc. Therefore, the design of the clean room not only requires the purification of the indoor air to achieve the specified air cleanliness level, but also must prevent pollution caused by improper construction materials and decoration methods of the clean room, and some clean rooms also require supply Ultra-pure water, ultra-pure gas and high-purity chemicals, etc. 1. The air cleanliness level required by semiconductor integrated circuits The air cleanliness level required by the integrated circuit production environment mainly depends on the integration degree of the integrated circuit. The air cleanliness level of different processes is determined based on the probability of possible pollution and the potential failure of the device. of. For example: Example 1. A factory's integrated circuit pre-process clean workshop. The dust-free workshop is designed to process and produce 6-inch silicon wafers and 1M integrated circuits. Dust room air cleanliness level requirements: ISO level 3 ion implantation in photolithography, dispensing area, etching CVD, epitaxy, diffusion and other operation areas ISO level 3 ion implantation, etching CVD, epitaxy, diffusion and other maintenance areas ISO level 5 Example 2. A factory's integrated circuit pre-process clean pharmaceutical cleanroom. The dust-free workshop is designed to process and produce 5-inch silicon wafers, 256K integrated circuits, graphic special-shaped rulers of 2.0um, and control particle size of 0.2um. The air cleanliness level of the dust-free pharmaceutical cleanroom Requirements: ISO 3 ion implantation in photolithography, sizing area, etching CVD, epitaxy, diffusion and other operating areas ISO 4 ion implantation, etching CVD, epitaxy, diffusion and other maintenance areas ISO 6 level 2, some electronic product production environments With the development of information industry technology, the improvement of the performance and quality of many electronic products and the miniaturization of the production process, the production environment is increasingly required to have a certain level of air cleanliness and control the process production in the dust-free workshop. Regarding the supply quality of various high-purity substances, there is currently no unified regulation on the air cleanliness level or production environment control requirements of electronic products at home and abroad. Technology, production process pharma machinery, raw and auxiliary materials for production and practical experience of clean room operation determine the air cleanliness level of design and construction of clean room. For example: Example 1, a clean room for the production of thin film transistor color liquid crystal displays, TFT-LCD has the advantages of small size, light weight, easy portability, low power consumption, vivid color, large capacity, high resolution display and so on. The air cleanliness level of each clean room is controlled to 0.3um particle size. Cleaning, gluing, exposure room ISO 4 level development, etching room ISO 5 level, box forming ISO level 5 sputtering, CVD room ISO 6 level Example 2 , A clean workshop for the production of high-density tapes, and a clean room to control the particle size of 0.5um. The air cleanliness level of each clean room requires ISO 5 spare parts for the coating head, tape cutting, tape base, testing, coating room and drying. Drying and curing rooms ISO 6 assembly, maintenance room and some raw material warehouse ISO 7 sanding, pharma machinery and accessories room ISO 8 finished product warehouse and some raw material warehouse quasi-clean room 3, high-tech machinery, fine chemical and other product production The air cleanliness level of the environment Example 1. A dust-free workshop for the production of gyroscopes The air cleanliness level of the dust-free workshop is required to be ISO 6 in the assembly room. ISO 5 in the bearing processing room. Example 2. Head, Coating Machine Head ISO Class 5 Coating Chamber, Casting Machine Chamber ISO Class 6

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