Construction Characteristics of High-level Electronics Factory Cleanroom
Electronic factory production process requirements for controlled environments
Electronic factories such as microelectronics factories, optoelectronics factories are inseparable from a clean production environment. The form and height of the building, the bearing capacity of the structure, the decoration materials of the envelope structure; Ambient air cleanliness, temperature and humidity, static pressure of the electronic factory cleanroom; The purity of water and gas, the content of heavy metals and and so on have requirements.
Large: The production process requires the area of the clean room to be larger and larger.
Clean: The requirements of the clean room for environmental cleanliness are becoming more and more clean.
Precision: The production process of electronic factories requires more and more precision in the control of ambient air temperature and humidity.
Pure: The purity requirements of high purity water, high purity gas and high purity solvent used in the production process of large-scale integrated circuits are becoming more and more pure.
Strict: The electronic industry production not only has strict requirements for the cleanliness of the environment, temperature and humidity, but also has strict requirements for environmental noise, illumination, static electricity, electromagnetic shielding, micro-vibration and so on.
Mixed flow clean rooms are often used in high-level electronics factories
The air supply scheme of fresh air unit (MAU) plus fan filter unit (FFU) plus dry cold coil (DC) is generally adopted in the air supply system of mixed flow clean room. At present, the hybrid clean room widely used in large-scale production plants such as microelectronics and optoelectronics at home and abroad has the advantages of convenient adjustment, significant energy saving, strong flexibility, adapting to the upgrading of electronic industry processes, and saving non-production area and non-production space. It is the best air treatment program and the best air supply system.
Cleanroom FFU in the scheme is to ensure a high level of cleanliness in the clean room. Filters in FFU according to cleanliness requirements, high efficiency filters (H14) or ultra-high efficiency filters (U15, U16, U17) can be used. The external noise of cleanroom FFU should be less than 50 dB(A). And the fan life of FFU should be 5000 ~ 8000 hours.
Suzhou Pharma Machinery Co.,Ltd.
2023/12/21
Tia
