Test method for clean room
Test method for clean room
Determination of air volume in clean room: For a one-way flow clean room, the air supply volume is determined by the method of the average wind speed of the room section and the product of the cross-sectional area, 0.3m away from the high-efficiency filter, and the section perpendicular to the airflow is used as the sampling test section. The distance between measuring points should not be greater than 0.6m, and the number of measuring points should not be less...
Text label: clean room test, clean room test method, China Clean Global Purification
Testing methods for clean room
Determination of air volume in clean room: For a one-way flow clean room, the air supply volume is determined by the method of the average wind speed of the room section and the product of the cross-sectional area, 0.3m away from the high-efficiency filter, and the section perpendicular to the airflow is used as the sampling test section. The distance between the measuring points should not be greater than 0.6m, the number of measuring points should not be less than 5, and the arithmetic mean of the wind speed readings of all the measuring points should be taken as the average wind speed. For non-unidirectional flow cleanrooms, use the tuyere method or the duct method to determine the supply air volume. The tuyere method is to connect the auxiliary air duct according to the shape of the tuyere at the tuyere where the high-efficiency filter is installed, that is, use galvanized steel sheet or other non-dust-producing materials to make the same shape and inner section as the tuyere, and the length is equal to 2 times the length of the tuyere. The straight pipe section with a long side is connected to the outside of the tuyere; on the outlet plane of the auxiliary air duct, the minimum number of measuring points is not less than 6 points and evenly arranged; for the long straight pipe section on the windward side of the tuyere and drilling holes have been or can be drilled, you can Use the air duct method to determine the air volume, and the measuring section should be located at a position greater than or equal to 3 times the pipe diameter or long side length before the local resistance component, and 5 times the pipe diameter or long side length after the local resistance component; The size of the pipe diameter, the section is divided into several concentric rings with the same area, each ring is measured at 4 points, the number of rings is determined according to the pipe diameter, and should not be less than 3; for rectangular air ducts, the measured section is divided into several Each small section is as close to a square as possible, and the side length should not be greater than 200mm. The measuring point should be located in the center of the small section, but the number of measuring points on the entire section should not be less than 3.
Clean room temperature humidity measurement: According to the fluctuation range of temperature and relative humidity, the corresponding instrument with sufficient accuracy should be selected for measurement, and the interval between each measurement should not be greater than 30min. Layout of indoor measuring points: at the return air outlet; the center of the clean room without constant temperature requirements; the representative surface of the constant temperature work area; the measuring points should generally be arranged at the same height greater than 0.5m from the outer wall surface and 0.8m from the ground. It can also be arranged on several planes at different heights from the ground according to the size of the constant temperature zone; for clean rooms with constant temperature and humidity requirements, the fluctuation range of room temperature is based on the maximum temperature of the deviation control point in each temperature of each measuring point. The percentage of the total number of measurement points is organized into a cumulative statistical curve. If the deviation value of more than 90% of the measurement points is within the range of room temperature fluctuations, it is in compliance with the design requirements, otherwise it is unqualified; the regional temperature is based on the lowest test temperature in each measurement point. , the average temperature of each measuring point and the number of points exceeding the deviation value, as a percentage of the total number of measuring points, are sorted into a cumulative statistical curve, and the deviation achieved by more than 90% of the measuring points is the regional temperature difference, which should meet the design requirements, and the relative temperature fluctuation range can be determined according to The regulations on the fluctuation range of room temperature are implemented. Zhongjing Global Purification can provide consulting, planning, design, construction, installation, transformation and other supporting services for clean rooms and clean rooms.
The static pressure difference should be measured under the condition that all doors are closed, from high pressure to low pressure, starting from the inner room farthest from the outside on the plane layout, and measuring outwards in turn. The differential pressure gauge used has a different sensitivity. It should be lower than 2pa; for adjacent clean rooms of different grades with connected holes, there should be a reasonable airflow direction at the openings. Leakage detection: For leak detection of high-efficiency filters, an optical particle counter with a sampling speed of more than 1L/min should be used, and a high-efficiency filter should be used for leak detection of particle counters. The upwind side should introduce uniform concentration of atmospheric dust or other aerosol dust. Air; the detection of high-efficiency filters adopts the scanning method, and the isokinetic sampling head of the particle counter is used on the leeward side of the filter, and is placed 20-30mm away from the surface of the inspected part. Mobile scanning inspection is carried out on the surface, frame and head glue; the detection of leakage rate should be carried out under the condition of clean design wind speed, and the leakage concentration measured on the downwind side of the inspected high-efficiency filter shall be converted into transmittance, and the high-efficiency filter shall not be More than 2 times of the factory qualified transmittance.
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